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National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
Bandpass filter for secondary electrons in SEM - simulations
 Konvalina, Ivo ; Mika, Filip ; Krátký, Stanislav ; Müllerová, Ilona
Scanning electron microscope (SEM) is commonly equipped with a through-the-lens secondary electron detector (TLD). The TLD detector in Magellan 400 FEG SEM works as a bandpass filter for the special setup of potentials of electrodes inside the objective lens, the positive potential on the specimen regulates the energy window of the filter. An energy filtered image contains additional information to that of an unfiltered one. The contrast of the filtered image is changed and new information about the topography and the material can be observed.\nTo understand image contrast formation with TLD detector we traced SEs and BSEs through the three-dimensional (3D) model of included 3D distribution of the electrostatic and magnetic fields. The properties of the bandpass filter were simulated for a working distance (WD) in the range of 1 mm to 3 mm and a primary beam energy (EP) from 1 keV to 10 keV.\nThe 3D electrostatic field of the system was calculated by Simion, magnetic field and raytracing were done using EOD program.
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